INTERNATIONAL PATENT: MODULIGHT CORPORATION FILES APPLICATION FOR "SYSTEM AND METHOD FOR FABRICATING HIGH-ASPECT-RATIO GRATINGS"

GENEVA, March 9 -- MODULIGHT CORPORATION (PL 77033101 Tampere) filed a patent application (PCT/FI2024/050411) for "SYSTEM AND METHOD FOR FABRICATING HIGH-ASPECT-RATIO GRATINGS" on Aug 09, 2024. With publication no. WO/2025/046167, the details related to the patent application was published on Mar 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): AHO, Timo (Muotialantie 82 A 433800 Tampere), MAHONEN, Mika (Tutkijankatu 2 a 1133720 Tampere)

Abstract: Disclosed is a method (100) for fabricating high-aspect-ratio gratings. The method comprises providing a semiconductor substrate (200). The ...