GENEVA, April 30 -- MKS INSTRUMENTS, INC. (2 Tech Drive, Suite 201Andover, Massachusetts 01810) filed a patent application (PCT/US2024/051204) for "PROCESS GAS DELIVERY CONTROL SYSTEM WITH CONCENTRATION MONITORING" on Oct 14, 2024. With publication no. WO/2025/085356, the details related to the patent application was published on Apr 24, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): DING, Junhua (2 Tech DriveSuite 201Andover, Massachusetts 01810), YE, Hongke (2 Tech Drive, Suite 201Andover, Massachusetts 01810)
Abstract:
A process gas delivery system comprising which includes a first ma...