INTERNATIONAL PATENT: MKS INC. FILES APPLICATION FOR "APPARATUS AND METHOD FOR RADICAL SPECIES DETECTION VIA PARAMAGNETIC GAS PROPERTIES"

GENEVA, Jan. 28 -- MKS INC. (2 Tech DriveAndover, Massachusetts 01810) filed a patent application (PCT/US2025/038000) for "APPARATUS AND METHOD FOR RADICAL SPECIES DETECTION VIA PARAMAGNETIC GAS PROPERTIES" on Jul 17, 2025. With publication no. WO/2026/019975, the details related to the patent application was published on Jan 22, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BRUCKER, Gerardo A. (2 Tech DriveAndover, Massachusetts 01810), HILL, Gordon (2 Tech Drive,Andover, Massachusetts 01810)

Abstract: An apparatus comprises a transport tube configured to transport a plasma gas flow, a s...