GENEVA, Aug. 11 -- MICROWAVE CHEMICAL CO., LTD. (6-1, Hirabayashiminami 1-chome, Suminoe-ku, Osaka-shi, Osaka5590025), マイクロ波化学株式会社 (大阪府大阪市住之江区平林南一丁目６－１) filed a patent application (PCT/JP2024/037218) for "SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, AND PROGRAM" on Oct 18, 2024. With publication no. WO/2025/163992, the details related to the patent application was published on Aug 07, 2025.
Notably, the patent application was submitted under the International Patent Classific...