INTERNATIONAL PATENT: MERCK PATENT GMBH FILES APPLICATION FOR "ORGANOMETALLIC CLUSTER CONTAINING SULFUR FOR EUV LITHOGRAPHY BACKGROUND"

GENEVA, Feb. 16 -- MERCK PATENT GMBH (Frankfurter Strasse 25064293 Darmstadt) filed a patent application (PCT/EP2024/072134) for "ORGANOMETALLIC CLUSTER CONTAINING SULFUR FOR EUV LITHOGRAPHY BACKGROUND" on Aug 05, 2024. With publication no. WO/2025/032041, the details related to the patent application was published on Feb 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LICHTENBERGER, Niels (c/o Merck Electronics KGaAFrankfurter Strasse 25064293 Darmstadt), HUDSON, Daniel (c/o Merck Electronics KGaAFrankfurter Strasse 25064293 Darmstadt), FACKLER, Philipp Hans (c/o Merck Electronics KGaAF...