INTERNATIONAL PATENT: MERCK PATENT GMBH FILES APPLICATION FOR "HYDROFLUOROCARBON COMPOUNDS AND THEIR USE IN INTEGRATED CIRCUIT MANUFACTURING PROCESSES"

GENEVA, Nov. 24 -- MERCK PATENT GMBH (Frankfurter Strasse 25064293 Darmstadt) filed a patent application (PCT/EP2025/063211) for "HYDROFLUOROCARBON COMPOUNDS AND THEIR USE IN INTEGRATED CIRCUIT MANUFACTURING PROCESSES" on May 14, 2025. With publication no. WO/2025/238070, the details related to the patent application was published on Nov 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KIRSCH, Peer (c/o Merck Electronics KGaAFrankfurter Strasse 25064293 Darmstadt), EICHHORN, Jens (c/o Merck Electronics KGaAFrankfurter Strasse 25064293 Darmstadt), BROWN, Forrest (c/o Versum Materials US, L...