GENEVA, Aug. 6 -- LAPMASTER INTERNATIONAL, LLC (501 W Algonquin RdMt Prospect, Illinois 60056) filed a patent application (PCT/US2025/012407) for "COOLING CONTROL IN CHEMICAL MECHANICAL POLISHING" on Jan 21, 2025. With publication no. WO/2025/160065, the details related to the patent application was published on Jul 31, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): RHOADES, Robert Lewis (14547 Brookfield DriveFishers, Indiana 46040), GIBAS, Czeslaw (5609 North CrescentNorwood Park, Illinois 60631), GARBAR, Isaak (375 Bay Tree CircleVernon Hills, Illinois 60061)
Abstract:
A wafer polishi...