INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "YTTRIUM ALUMINUM OXIDE CERAMIC PLATE FOR AN ELECTROSTATIC CHUCK"

GENEVA, Aug. 19 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/010763) for "YTTRIUM ALUMINUM OXIDE CERAMIC PLATE FOR AN ELECTROSTATIC CHUCK" on Jan 08, 2025. With publication no. WO/2025/170700, the details related to the patent application was published on Aug 14, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PAPE, Eric A. (c/o Lam Research Corporation4650 Cushing Parkway M/S CA-1Fremont, California 94538)

Abstract: An electrostatic chuck having a more erosion-resistant ceramic plate when under exposure to corrosive en...