INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "TWO-PIECE COOLING PLATE FOR A SHOWERHEAD OF A SUBSTRATE PROCESSING SYSTEM"

GENEVA, Oct. 14 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/021496) for "TWO-PIECE COOLING PLATE FOR A SHOWERHEAD OF A SUBSTRATE PROCESSING SYSTEM" on Mar 26, 2025. With publication no. WO/2025/212331, the details related to the patent application was published on Oct 09, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): POOL, Jeremy Jerome (4650 Cushing ParkwayFremont, California 94538), BORTH, Andrew (4650 Cushing ParkwayFremont, California 94538), DONNELLY, Sean M. (4650 Cushing ParkwayFremont, California 94538), GOMM, T...