INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "TUNED FOCUS RING FOR UNIFORMITY IMPROVEMENT OF PLASMA-ASSISTED PROCESSES"

GENEVA, Jan. 6 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/031010) for "TUNED FOCUS RING FOR UNIFORMITY IMPROVEMENT OF PLASMA-ASSISTED PROCESSES" on May 27, 2025. With publication no. WO/2026/005937, the details related to the patent application was published on Jan 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): XU, Chen (4650 Cushing ParkwayFremont, California 94538), WANG, Dong (4650 Cushing ParkwayFremont, California 94538), LEI, Tong (4650 Cushing ParkwayFremont, California 94538), HU, Zhen Hua (4650 Cushing Park...