INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "THERMAL INTERFACE COMPONENT FOR A PLASMA PROCESSING TOOL"

GENEVA, Sept. 10 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/017428) for "THERMAL INTERFACE COMPONENT FOR A PLASMA PROCESSING TOOL" on Feb 26, 2025. With publication no. WO/2025/184236, the details related to the patent application was published on Sep 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SRINIVASAN, Satish (4650 Cushing ParkwayFremont, California 94538), XU, Lin (4650 Cushing ParkwayFremont, California 94538)

Abstract: Examples are disclosed that relate to a thermal interface component for a plasma proc...