INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "TEMPORAL SWITCHING TO ACHIEVE GEOMETRIC SELECTIVE DEPOSITION OF CARBON IN PATTERNED FEATURES"

GENEVA, Oct. 6 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/022115) for "TEMPORAL SWITCHING TO ACHIEVE GEOMETRIC SELECTIVE DEPOSITION OF CARBON IN PATTERNED FEATURES" on Mar 28, 2025. With publication no. WO/2025/208079, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SUBRAMANIAN, Ashwanth (4650 Cushing ParkwayFremont, California 94538), TROAST, Delphine Katherine (4650 Cushing ParkwayFremont, California 94538), ZHANG, Pengyi (4650 Cushing ParkwayFremon...