INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "TEMPERATURE CONTROL OF SUBSTRATE PROCESSING CHAMBER PLATES USING PWM TO ANALOG CONVERTERS AND PROPORTIONAL VALVES"

GENEVA, Nov. 11 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/026622) for "TEMPERATURE CONTROL OF SUBSTRATE PROCESSING CHAMBER PLATES USING PWM TO ANALOG CONVERTERS AND PROPORTIONAL VALVES" on Apr 28, 2025. With publication no. WO/2025/230886, the details related to the patent application was published on Nov 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HARIDASU, Raja Narendra (4650 Cushing ParkwayFremont, California 94538), SENAPATH, Senapath (4650 Cushing ParkwayFremont, California 94538), VALLABHANENI, Kiran Kumar...