INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SYSTEMS AND TECHNIQUES FOR GAS DELIVERY FOR SEMICONDUCTOR PROCESSING"

GENEVA, Jan. 6 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/034089) for "SYSTEMS AND TECHNIQUES FOR GAS DELIVERY FOR SEMICONDUCTOR PROCESSING" on Jun 18, 2025. With publication no. WO/2026/006065, the details related to the patent application was published on Jan 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LIND, Gary Bridger (4650 Cushing Pkwy.Fremont, California 94538), RAJA, Harini Nivetha (4650 Cushing Pkwy.Fremont, California 94538), KITTUR, Vishalsagar (4650 Cushing Pkwy.Fremont, California 94538)

Abstract: In ...