INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SYSTEMS AND TECHNIQUES FOR BULK PRECURSOR DELIVERY FOR SEMICONDUCTOR PROCESSING"

GENEVA, Sept. 10 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/017081) for "SYSTEMS AND TECHNIQUES FOR BULK PRECURSOR DELIVERY FOR SEMICONDUCTOR PROCESSING" on Feb 24, 2025. With publication no. WO/2025/184048, the details related to the patent application was published on Sep 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHANDRASEKHARAN, Ramesh (4650 Cushing Pkwy.Fremont, California 94538), STUMPF, John Folden (4650 Cushing Pkwy.Fremont, California 94538), BODAGHKHANI, Armin (4650 Cushing Pkwy.Fremont, California 94538...