INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SYSTEMS AND METHODS TO IMPROVE WAFER BOW COMPENSATION EFFICIENCY AND FLATTEN WAFERS TO NEUTRAL BOW"

GENEVA, May 19 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/055216) for "SYSTEMS AND METHODS TO IMPROVE WAFER BOW COMPENSATION EFFICIENCY AND FLATTEN WAFERS TO NEUTRAL BOW" on Nov 08, 2024. With publication no. WO/2025/101963, the details related to the patent application was published on May 15, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WANG, Ruisong (4650 Cushing Pkwy.Fremont, California 94538), HUANG, Yanhui (4650 Cushing Pkwy.Fremont, California 94538), SHAIKH, Fayaz A. (4650 Cushing Pkwy.Fremont, California 94538)...