INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SYSTEMS AND METHODS FOR ORTHOGONAL CONTROL OF ION ENERGY FOR HAR ETCHING"

GENEVA, June 25 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/US2024/058299) for "SYSTEMS AND METHODS FOR ORTHOGONAL CONTROL OF ION ENERGY FOR HAR ETCHING" on Dec 03, 2024. With publication no. WO/2025/128367, the details related to the patent application was published on Jun 19, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SINGH, Amit, Kumar (4650 Cushing ParkwayFremont, CA 94538)

Abstract: Systems and methods for orthogonal control of Ion energy for High Aspect Ratio (HAR) etching are described. One of the methods includes control...