INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SYSTEMS AND METHODS FOR CREATING AN IEDF USING A NON-SINUSOIDAL GENERATOR"

GENEVA, Dec. 17 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/US2025/032338) for "SYSTEMS AND METHODS FOR CREATING AN IEDF USING A NON-SINUSOIDAL GENERATOR" on Jun 04, 2025. With publication no. WO/2025/255272, the details related to the patent application was published on Dec 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): JUNG, Soonwook (4650 Cushing ParkwayFremont, CA 94538), KAMP, Tom (4650 Cushing ParkwayFremont, CA 94538), PATERSON, Alexander, Miller (4650 Cushing ParkwayFremont, CA 94538)

Abstract: An ion energy distribution f...