INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SUBSTRATE PROCESSING SYSTEM WITH IN-SITU CAPACITIVE DIVIDERS FOR DETECTION OF PLASMA PROPERTIES"

GENEVA, May 14 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/050891) for "SUBSTRATE PROCESSING SYSTEM WITH IN-SITU CAPACITIVE DIVIDERS FOR DETECTION OF PLASMA PROPERTIES" on Oct 11, 2024. With publication no. WO/2025/096169, the details related to the patent application was published on May 08, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHOI, Myeong Yeol (4650 Cushing ParkwayFremont, California 94538), DREWERY, John (4650 Cushing ParkwayFremont, California 94538), PEASE, John (4650 Cushing ParkwayFremont, California 94...