INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SHOWERHEAD OR SHOWER-PEDESTAL EDGE RING FOR FILM EDGE THICKNESS MODULATION"

GENEVA, Aug. 6 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/012453) for "SHOWERHEAD OR SHOWER-PEDESTAL EDGE RING FOR FILM EDGE THICKNESS MODULATION" on Jan 21, 2025. With publication no. WO/2025/160084, the details related to the patent application was published on Jul 31, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HUANG, Yanhui (4650 Cushing Pkwy.Fremont, California 94538), HAMMA, Soumana (4650 Cushing Pkwy.Fremont, California 94538), LINEBARGER, JR., Nick Ray (4650 Cushing Pkwy.Fremont, California 94538)

Abstract: ...