INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SHIELD FOR PLASMA CHAMBERS"

GENEVA, June 18 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/058176) for "SHIELD FOR PLASMA CHAMBERS" on Dec 03, 2024. With publication no. WO/2025/122447, the details related to the patent application was published on Jun 12, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SOVANI, Yogesh Mahesh (4650 Cushing ParkwayFremont, California 94538), PATIL, Ravikumar (4650 Cushing ParkwayFremont, California 94538), IRUDAYARAJ, Jesu Titus (4650 Cushing ParkwayFremont, California 94538), KERNS, John Michael (4650 Cushing ParkwayFre...