INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SELECTIVITY IN THERMAL ETCH PROCESSES THROUGH SURFACE PASSIVATION"

GENEVA, April 16 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/049483) for "SELECTIVITY IN THERMAL ETCH PROCESSES THROUGH SURFACE PASSIVATION" on Oct 01, 2024. With publication no. WO/2025/076005, the details related to the patent application was published on Apr 10, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MUSSELWHITE, Nathan (4650 Cushing Pkwy.Fremont, California 94538), CHEN, Kun-Chieh (4650 Cushing Pkwy.Fremont, California 94538), GAO, Zehua (4650 Cushing Pkwy.Fremont, California 94538), GURA, Anna (4650 Cushing Pk...