INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SELECTIVE ETCHING BY REMOVAL OF A VOLATILIZABLE TERMINAL FUNCTIONAL GROUP"

GENEVA, March 18 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/045305) for "SELECTIVE ETCHING BY REMOVAL OF A VOLATILIZABLE TERMINAL FUNCTIONAL GROUP" on Sep 05, 2024. With publication no. WO/2025/054262, the details related to the patent application was published on Mar 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YANG, Wenbing (4650 Cushing ParkwayFremont, California 94538), RAMNANI, Pankaj Ghanshyam (4650 Cushing ParkwayFremont, California 94538), BALAN, Arunima Deya (4650 Cushing ParkwayFremont, California 94538)...