INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SELECTIVE CARBON REMOVAL TREATMENT PROCESS USING METASTABLE ACTIVATED RADICAL SPECIES"

GENEVA, July 3 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/060206) for "SELECTIVE CARBON REMOVAL TREATMENT PROCESS USING METASTABLE ACTIVATED RADICAL SPECIES" on Dec 13, 2024. With publication no. WO/2025/136832, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KUNG, Shengchin (4650 Cushing Pkwy.Fremont, California 94538), GAO, Changrui (4650 Cushing Pkwy.Fremont, California 94538), LO, Ta-Yu (4650 Cushing Pkwy.Fremont, California 94538), KALINOVSKI, Ilia...