INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SACRIFICIAL FILM TO REDUCE BOWING FOR A HIGH ASPECT RATIO ETCH"

GENEVA, July 3 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/059385) for "SACRIFICIAL FILM TO REDUCE BOWING FOR A HIGH ASPECT RATIO ETCH" on Dec 10, 2024. With publication no. WO/2025/136746, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): OZEL, Taner (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), WONG, Merrett (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), WILCOXSON, Mark (c...