INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "REPLACEABLE HEATER TERMINAL ASSEMBLIES FOR SUBSTRATE SUPPORTS OF SUBSTRATE PROCESSING SYSTEMS"

GENEVA, Jan. 27 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/036600) for "REPLACEABLE HEATER TERMINAL ASSEMBLIES FOR SUBSTRATE SUPPORTS OF SUBSTRATE PROCESSING SYSTEMS" on Jul 07, 2025. With publication no. WO/2026/019587, the details related to the patent application was published on Jan 22, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): XUE, Ju (4650 Cushing ParkwayFremont, California 94538), MITROVIC, Slobodan (4650 Cushing ParkwayFremont, California 94538), LIU, Sai (4650 Cushing ParkwayFremont, California 94538), EHR...