INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "REMOTE PLASMA-BASED DEPOSITION"

GENEVA, Oct. 28 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/025026) for "REMOTE PLASMA-BASED DEPOSITION" on Apr 16, 2025. With publication no. WO/2025/221932, the details related to the patent application was published on Oct 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): TOPPING, Stephen (4650 Cushing Pkwy.Fremont, California 94538), SRINIVASAN, Easwar (4650 Cushing Pkwy.Fremont, California 94538), VARADARAJAN, Bhadri N. (4650 Cushing Pkwy.Fremont, California 94538), HAUSMANN, Dennis M. (4650 Cushing Pkwy.Fremont, Cal...