INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PULSED DC SYSTEMS AND METHODS FOR CONTROLLING ETCH RATE USING AN LC CIRCUIT"

GENEVA, Dec. 10 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/US2025/031032) for "PULSED DC SYSTEMS AND METHODS FOR CONTROLLING ETCH RATE USING AN LC CIRCUIT" on May 27, 2025. With publication no. WO/2025/250537, the details related to the patent application was published on Dec 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MARAKHTANOV, Alexei, M. (4650 Cushing ParkwayFremont, CA 94538), JI, Bing (4650 Cushing ParkwayFremont, CA 94538), KIM, Bongseong (4650 Cushing ParkwayFremont, CA 94538), ZHAO, Lin (4650 Cushing ParkwayFremont, C...