INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PULSED DC BIAS FOR SUBSTRATE PROCESSING SYSTEM WITH REMOTE PLASMA"

GENEVA, Feb. 11 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/038474) for "PULSED DC BIAS FOR SUBSTRATE PROCESSING SYSTEM WITH REMOTE PLASMA" on Jul 21, 2025. With publication no. WO/2026/030027, the details related to the patent application was published on Feb 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KALINOVSKI, Ilia (4650 Cushing ParkwayFremont, California 94538), XIONG, Zichang (4650 Cushing ParkwayFremont, California 94538), JUNG, Soonwook (4650 Cushing ParkwayFremont, California 94538), DODDAHANUMAIAH, Deva...