INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PULSE GAPS FOR ETCH PRODUCT REFRESH AND PLASMA SHEATH THICKNESS UNIFORMITY"

GENEVA, July 21 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/US2024/061808) for "PULSE GAPS FOR ETCH PRODUCT REFRESH AND PLASMA SHEATH THICKNESS UNIFORMITY" on Dec 23, 2024. With publication no. WO/2025/151289, the details related to the patent application was published on Jul 17, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KAMP, Tom, A. (4650 Cushing ParkwayFremont, CA 94538), NAVOTNAYA, Polina (4650 Cushing ParkwayFremont, CA 94538)

Abstract: A system for generating plasma through inductive coupling using an inner and outer coil...