INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PROVISION OF RF SIGNALS TO A MULTI-STATION FABRICATION CHAMBER"

GENEVA, Dec. 10 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/030573) for "PROVISION OF RF SIGNALS TO A MULTI-STATION FABRICATION CHAMBER" on May 22, 2025. With publication no. WO/2025/250435, the details related to the patent application was published on Dec 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): FRENCH, David (4650 Cushing Pkwy.Fremont, California 94538), KUDELA, Jozef (4650 Cushing Pkwy.Fremont, California 94538)

Abstract: Techniques for provision of RF signals to a multi-station fabrication chamber are provi...