INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PRECURSOR CONCENTRATION MONITORING"

GENEVA, May 28 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/055949) for "PRECURSOR CONCENTRATION MONITORING" on Nov 14, 2024. With publication no. WO/2025/106690, the details related to the patent application was published on May 22, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WANG, Chen (c/o Lam Research Corporation4650 Cushing Pkwy.Fremont, California 94538), VOLOSSKIY, Boris (c/o Lam Research Corporation4650 Cushing Pkwy.Fremont, California 94538), STEVENS, Jason (c/o Lam Research Corporation4650 Cushing Pkwy.Fremont,...