INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PLASMA PROCESSING SYSTEM INCLUDING SEGMENTED ELECTRODE WITH FLOATING SEGMENTS"

GENEVA, March 10 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/042899) for "PLASMA PROCESSING SYSTEM INCLUDING SEGMENTED ELECTRODE WITH FLOATING SEGMENTS" on Aug 19, 2024. With publication no. WO/2025/049148, the details related to the patent application was published on Mar 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KASOUIT, Samir (4650 Cushing ParkwayFremont, California 94538), HOLLAND, John (4650 Cushing ParkwayFremont, California 94538), KELLOGG, Michael C. (4650 Cushing ParkwayFremont, California 94538), ANGOL...