INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PLASMA GENERATING SYSTEM FOR CONTROLLING ION ENERGY DISTRIBUTION IN A PLASMA PROCESSING SYSTEM"

GENEVA, July 21 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/010419) for "PLASMA GENERATING SYSTEM FOR CONTROLLING ION ENERGY DISTRIBUTION IN A PLASMA PROCESSING SYSTEM" on Jan 06, 2025. With publication no. WO/2025/151359, the details related to the patent application was published on Jul 17, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KIM, Bongseong (4650 Cushing ParkwayFremont, California 94538), MARAKHTANOV, Alexei (4650 Cushing ParkwayFremont, California 94538), HOLLAND, John (4650 Cushing ParkwayFremont, Californ...