INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PINHOLE PROBABILITY ANALYSIS METHODS FOR PHOTORESIST FILMS"

GENEVA, Feb. 4 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/037860) for "PINHOLE PROBABILITY ANALYSIS METHODS FOR PHOTORESIST FILMS" on Jul 16, 2025. With publication no. WO/2026/024517, the details related to the patent application was published on Jan 29, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZHANG, Yichi (4650 Cushing Pkwy.Fremont, California 94538), MATHUR, Monica Sawkar (4650 Cushing Pkwy.Fremont, California 94538)

Abstract: A probability-based simulation analysis method to predict pinhole formation in a phot...