INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PASSIVATION FOR ETCHING OF SEMICONDUCTOR MATERIALS WITH SEAM-LIKE DEFECTS"

GENEVA, Nov. 19 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/028674) for "PASSIVATION FOR ETCHING OF SEMICONDUCTOR MATERIALS WITH SEAM-LIKE DEFECTS" on May 09, 2025. With publication no. WO/2025/235908, the details related to the patent application was published on Nov 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHENG, I-Kai (4650 Cushing Pkwy.Fremont, California 94538), LO, Ta-Yu (4650 Cushing Pkwy.Fremont, California 94538), XIA, Man (4650 Cushing Pkwy.Fremont, California 94538), HUANG, Ching-Chia (4650 Cushing Pkw...