INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "OXIDIZING PLASMA-FREE SILICON OXIDE DEPOSITION"

GENEVA, Oct. 28 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/024780) for "OXIDIZING PLASMA-FREE SILICON OXIDE DEPOSITION" on Apr 15, 2025. With publication no. WO/2025/221797, the details related to the patent application was published on Oct 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): NYE DE CASTRO, Rachel Anna (4650 Cushing Pkwy.Fremont, California 94538), REDDY, Kapu Sirish (4650 Cushing Pkwy.Fremont, California 94538), HAUSMANN, Dennis M. (4650 Cushing Pkwy.Fremont, California 94538), MCKERROW, Andrew John (4650 ...