INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "MULTI-COIL SYSTEM FOR ETCHING UNIFORMITY CONTROL"

GENEVA, Aug. 12 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/US2025/011262) for "MULTI-COIL SYSTEM FOR ETCHING UNIFORMITY CONTROL" on Jan 10, 2025. With publication no. WO/2025/165553, the details related to the patent application was published on Aug 07, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RIGHETTI, Fabio (4650 Cushing ParkwayFremont, CA 94538), PAENG, Dong, Woo (4650 Cushing ParkwayFremont, CA 94538), BISE, Ryan (4650 Cushing ParkwayFremont, CA 94538), NAGAL, Daniel, G. (4650 Cushing ParkwayFremont, CA 94538), ALHART, Scott...