INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "MONITORING SUBSTRATE PROPERTIES BY TRANSMITTING LASER LIGHT THROUGH A CERAMIC LAYER OF AN ELECTROSTATIC CHUCK"

GENEVA, Nov. 19 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/028103) for "MONITORING SUBSTRATE PROPERTIES BY TRANSMITTING LASER LIGHT THROUGH A CERAMIC LAYER OF AN ELECTROSTATIC CHUCK" on May 07, 2025. With publication no. WO/2025/235583, the details related to the patent application was published on Nov 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WU, Yewei (4650 Cushing ParkwayFremont, California 94538), EHRLICH, Darrell (4650 Cushing ParkwayFremont, California 94538), SAMULON, Eric (4650 Cushing ParkwayFremont, C...