INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "MOLD STACK FOR HIGH ASPECT RATIO PLASMA ETCHING"

GENEVA, Nov. 11 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/027006) for "MOLD STACK FOR HIGH ASPECT RATIO PLASMA ETCHING" on Apr 30, 2025. With publication no. WO/2025/231084, the details related to the patent application was published on Nov 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LEE, Sangchul (4650 Cushing Pkwy.Fremont, California 94538), CHI, Kyeong-Koo (4650 Cushing Pkwy.Fremont, California 94538), PISKUN, Ilya (4650 Cushing Pkwy.Fremont, California 94538), OH, Youn-Jin (4650 Cushing Pkwy.Fremont, Californi...