INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "MINIMIZING CONTAMINATION WITHIN SUBSTRATE CLEANING CHAMBER"

GENEVA, Aug. 26 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/015021) for "MINIMIZING CONTAMINATION WITHIN SUBSTRATE CLEANING CHAMBER" on Feb 07, 2025. With publication no. WO/2025/174670, the details related to the patent application was published on Aug 21, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MARTIN, Daniel James (4650 Cushing Pkwy.Fremont, California 94538), LEWIS, Jeffrey (4650 Cushing Pkwy.Fremont, California 94538), TOTH, Kristof (4650 Cushing Pkwy.Fremont, California 94538), CHUA, Lee (4650 Cushing Pkwy.Fre...