INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "METHODS AND TOOLS FOR ETCHING TITANIUM-CONTAINING FILMS"

GENEVA, June 25 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/059383) for "METHODS AND TOOLS FOR ETCHING TITANIUM-CONTAINING FILMS" on Dec 10, 2024. With publication no. WO/2025/128575, the details related to the patent application was published on Jun 19, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LIANG, Chen-Wei (4650 Cushing ParkwayFremont, California 94538), KUO, Ming-Shu (4650 Cushing ParkwayFremont, California 94538), HSIAO, Huai-Yu (4650 Cushing ParkwayFremont, California 94538), TAN, Sok Kiow (4650 Cushing Park...