INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "METHODS AND APPARATUSES USING TUNABLE REACTIVE GAS SOURCE"

GENEVA, April 8 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/048728) for "METHODS AND APPARATUSES USING TUNABLE REACTIVE GAS SOURCE" on Sep 26, 2024. With publication no. WO/2025/072569, the details related to the patent application was published on Apr 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MUI, David S. L. (4650 Cushing Pkwy.Fremont, California 94538), PARIMI, Venkata Sharat Chandra (4650 Cushing Pkwy.Fremont, California 94538), SHARIATI, Yusef Abdurraheem (4650 Cushing Pkwy.Fremont, California 94538), ZHU, Ji...