INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "METHOD FOR SIMULTANEOUS SELECTIVE DEPOSITION OF BOTH METAL AND DIELECTRIC FILMS"

GENEVA, Feb. 18 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/039911) for "METHOD FOR SIMULTANEOUS SELECTIVE DEPOSITION OF BOTH METAL AND DIELECTRIC FILMS" on Jul 26, 2024. With publication no. WO/2025/034436, the details related to the patent application was published on Feb 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HAUSMANN, Dennis M. (4650 Cushing Pkwy.Fremont, California 94538), AGNEW, Douglas Walter (4650 Cushing Pkwy.Fremont, California 94538), SMITH, Joel David (4650 Cushing Pkwy.Fremont, California 94538), B...