GENEVA, March 10 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/043604) for "MEMBRANE FRAME FOR ELECTRODEPOSITION TOOL" on Aug 23, 2024. With publication no. WO/2025/049294, the details related to the patent application was published on Mar 06, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): ORKIN, James Francis (4650 Cushing ParkwayFremont, California 94538), VO, Tune (4650 Cushing ParkwayFremont, California 94538), GOH, Edwin (4650 Cushing ParkwayFremont, California 94538)
Abstract:
An electrodeposition tool comprises a...