INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "LOW-VOLUME SHOWERHEAD FOR SEMICONDUCTOR PROCESSING OPERATIONS"

GENEVA, July 21 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/011094) for "LOW-VOLUME SHOWERHEAD FOR SEMICONDUCTOR PROCESSING OPERATIONS" on Jan 10, 2025. With publication no. WO/2025/151727, the details related to the patent application was published on Jul 17, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VIKRAMAN, Nivin (c/o Lam Research Corporation4650 Cushing ParkwayFremont, California 94538), DURUKAN, Ilker (c/o Lam Research Corporation4650 Cushing ParkwayFremont, California 94538), PAI, Uday (c/o Lam Research Corpora...