INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "LIQUID SENSORS FOR SUBSTRATE PROCESSING SYSTEMS"

GENEVA, Dec. 31 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/032969) for "LIQUID SENSORS FOR SUBSTRATE PROCESSING SYSTEMS" on Jun 10, 2025. With publication no. WO/2025/264429, the details related to the patent application was published on Dec 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): TANDURKAR, Mallikarjun (4650 Cushing ParkwayFremont, California 94538), BHAT, Kota Chalukya (4650 Cushing ParkwayFremont, California 94538), SAWLANI, Kapil (4650 Cushing ParkwayFremont, California 94538), STUMPF, John Folden (4650 C...