INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "LIQUID COOLED CERAMIC WINDOW FOR INDUCTIVELY COUPLED PLASMA PROCESSING SYSTEMS"

GENEVA, June 18 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/056839) for "LIQUID COOLED CERAMIC WINDOW FOR INDUCTIVELY COUPLED PLASMA PROCESSING SYSTEMS" on Nov 21, 2024. With publication no. WO/2025/122357, the details related to the patent application was published on Jun 12, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RONNE, Allan (4650 Cushing ParkwayFremont, California 94538), LEI, Pingyan (4650 Cushing ParkwayFremont, California 94538), FU, Yuehong (4650 Cushing ParkwayFremont, California 94538), SONG, Yangkun (4...