INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "INTERLACED, MULTI-ZONE GAS DISTRIBUTION FOR ASYMMETRIC WAFER BOW COMPENSATION"

GENEVA, March 4 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/042531) for "INTERLACED, MULTI-ZONE GAS DISTRIBUTION FOR ASYMMETRIC WAFER BOW COMPENSATION" on Aug 15, 2024. With publication no. WO/2025/042696, the details related to the patent application was published on Feb 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HUANG, Yanhui (4650 Cushing Pkwy.Fremont, California 94538), LEE, James Forest (4650 Cushing Pkwy.Fremont, California 94538), WANG, Ruisong (4650 Cushing Pkwy.Fremont, California 94538), BOATRIGHT, Daniel...