INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "INDEXING OF AUTOGAPPING SENSING DEVICE FOR SETTING GAPS BETWEEN SHOWERHEADS AND SUBSTRATE SUPPORTS"

GENEVA, Aug. 19 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/011684) for "INDEXING OF AUTOGAPPING SENSING DEVICE FOR SETTING GAPS BETWEEN SHOWERHEADS AND SUBSTRATE SUPPORTS" on Jan 15, 2025. With publication no. WO/2025/170726, the details related to the patent application was published on Aug 14, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHANNABASAPPA, Manjunatha Hosahally (4650 Cushing ParkwayFremont, California 94538)

Abstract: An indexing arm for indexing an device within a process chamber includes: a first me...